Platforms

PVD & CVD

Chemical Preparation

Micro-Nano Fabrication

Film Preparation

Performance Test

Research Area

Research Funds

Photogallery

PVD & CVD

• GSL-1100X vacuum tube furnace
• OTF-1200X vacuum tube furnace
• GSL1500X vacuum tube furnace
• KSL1100X chamber furnace
• SJG-12 1200℃ rapid-heating tube furnace
• SJG-16 1600℃ rapid-heating tube furnace
• CMF1100 chamber furnace
• SK-3-8K open-type resistance furnace

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Chemical Preparation

• RST5200 electrochemical workstation
• KR20005 200V/5A DC power supply
• TG16-WS table centrifuge
• M8812 75V/2A DC power supply
• electrospinning equipment
• DZF-6050 vacuum drying oven
• DHG-9140A drying oven
• drying oven
• DHG-9030A drying oven

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Micro-Nano Fabrication

• Leica DM 2500M metallographic microscope
• Lithography
• RIE-3 etching instrument
• Ion milling instrument
• Probe Station
• SH2000 wire bonding

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Film Preparation

• JGP-450A magnetron sputtering
• Jinsheng micro-nano magnetron sputtering

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Performance Test

• Electrical measurement system
• Keithley 248 high voltage power supply
• Keithley 2600A digital power supply
• Solar simulator

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